Comparison ledger
KLA .496 PSL Wafer, KLA eDR 5210 DR-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA eDR |
| Specifications | ||
| Configuration | NIST Traceable[1] | 2 Load Port (Brooks FixLoad)[3] |
| Wafer size | 8 inch[1] | 12 inch (300 mm)[4] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[4] |
| Robot & Aligner | — | Brooks[3] |
| TMP | — | Edward[3] |
| Ion pump | — | Varian[3] |
| Vintage | — | 2010[4] |
| Tool type | — | Defect review scanning electron microscope[3] |
| Wafer handling | — | Robot & Aligner (Brooks)[3] |
| Vacuum & pumping | — | TMP (Edward); Ion pump (Varian)[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →