Comparison ledger
KLA 1.112 PSL Wafer, Thermo Fisher Scientific FEI NanoLab 450 F 1 FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI NanoLab 450 F 1 FIB-SEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Thermo Fisher Scientific FEI NanoLab 450 F 1 FIB-SEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Dual Beam[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Voltage | — | 230V, 50/60Hz[3] |
| OEM | — | Thermo Fisher Scientific / FEI[3] |
| Model | — | NanoLab 450 F 1[3] |
| Tool type | — | Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)[3] |
| Power requirement | — | 230V, 50/60Hz[3] |
| Electron column | — | E-col Elstar-UC Mk2+iC Electron Column p/n 1044651[3] |
| SE detector | — | SE Detector R 580 p/n 4022 293 43761[3] |
| Gas injection system | — | MGIS Multiple Gas Injection system p/n 1060928 rev D[3] |
| BSD amplifier | — | 6-ch BSD Amplifier MK3.1 p/n 1027639[3] |
| Plasma cleaner unit | — | 150um Plasma Cleaner Unit LP p/n 1032272[3] |
| Rotary probe shaft | — | Rotary Probe Shaft p/n 1002428[3] |
| Nanomanipulator | — | EasyLift Nanomanipulator[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →