Comparison ledger
KLA 1.112 PSL Wafer, Rigaku Ultima III, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Ultima IIIRigaku | |
|---|---|---|
| OEM | KLA | Rigaku |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Rigaku Ultima III |
| Specifications | ||
| Configuration | NIST Traceable[1] | 1D D/teX Ultra high-speed silicon strip detector[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| 1.2kW Cu Ka X-ray generator | — | λ = 1.5405 Å[3] |
| X-ray generator ranges | — | 20 kV to 30 kV; 2 mA to 40 mA[3] |
| Detectors | — | Scintillation point detector and a high-speed position sensitive detector system Dtex Ultra[3] |
| Optics | — | Bragg Brentano parafocusing optics and parallel beam optics with a parabolic X-ray mirror[3] |
| Auto Sample Exchanger | — | ACS-10[3] |
| Stage | — | Five axes high precision goniometer, fixed standard stage, and thin-film stage[3] |
| Monochromator | — | Ge (220) 2-bounce incident beam monochromator and graphite diffraction beam monochromator[3] |
| Instrument type | — | X-ray diffractometer / powder diffractometer[3] |
| Operating mode | — | theta/2theta mode[4] |
| Sample mounting design | — | 2θ/θ design for horizontal sample mounting[5] |
| X-ray generator | — | 1.2 kW Cu Ka X-ray generator; wavelength λ = 1.5405 Å[3] |
| X-ray generator range | — | 20 kV to 30 kV; 2 mA to 40 mA[3] |
| Detector | — | Scintillation point detector and high-speed position sensitive detector system Dtex Ultra[3] |
| Sample stages | — | Standard powder stage, thin-film stage, small angle X-ray scattering stage (SAXS), and Differential Scanning Calorimetry-X-ray Diffraction Stage (DSC-XRD) stage[4] |
| Sample changer | — | Automatic sample exchanger (ASC-10)[3] |
| Software | — | Database and analysis software available on the operation PC and workstation PC[3] |
| Sample types | — | Bulk powders, thin-films, and liquids[4] |
| Stage(s) | — | Standard powder stage, thin-film stage, small angle X-ray scattering stage (SAXS), and Differential Scanning Calorimetry-X-ray Diffraction stage (DSC-XRD)[4] |
| Automated sample handling | — | Automatic sample exchanger (ASC-10)[3] |
| Monochromators | — | Ge (220) 2-bounce incident beam monochromator and graphite diffraction beam monochromator[3] |
| Stage / goniometer | — | Five axes high precision goniometer, fixed standard stage, and thin-film stage[3] |
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