Waferpedia

Comparison ledger

1.112 PSL WaferversusD 9650 C-SAM Acoustic

KLA 1.112 PSL Wafer, Nordson D 9650 C-SAM Acoustic, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLANordson
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferNordson D 9650 C-SAM Acoustic
Specifications
ConfigurationNIST Traceable[1]Single Phase[3]
Wafer Size8 inch[1]—
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
VRM—FDI[3]
Manufacturer—Nordson / Sonoscan[3]
Model—D 9650 C-SAM[3]
Tool type—Acoustic microscope[4]
Category—Metrology & Inspection[4]
Power—Single Phase[4]
Electrical—AS/NZS 3112 10A, 250V[4]
Control/software—Sonolytics2 and Windows 10[3]
Software—Sonosimulator Software[3]
Option—Thickness Measurement Module (manual)[3]
Monitor—Second 24" Monitor (D96)[3]
Megapixel—8k - 67 Megapixel[3]
Vintage—2021[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com