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1.112 PSL WaferversusOP 5240 I

KLA 1.112 PSL Wafer, KLA OP 5240 I, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1.112 PSL WaferKLA
OP 5240 IKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferKLA OP 5240
Specifications
ConfigurationNIST Traceable[1]5 Amps[3]
Wafer Size8 inch[1]—
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
Phase—1 Phase[3]
Voltage—200 Vac[3]
Amperage—5 Amps[3]
Vintage—1999[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing