Comparison ledger
KLA 1.112 PSL Wafer, KLA Archer 200 AIM Overlay, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Archer 200 AIM Overlay |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Category | — | Metrology & Inspection[3] |
| Manufacturer | — | KLA[4] |
| Model | — | Archer 200 AIM[4] |
| Wafer Size Maximum | — | 300 mm[5] |
| Wafer Size Minimum | — | 200 mm[5] |
| Year of Manufacture | — | 2006[5] |
| Cassette to Cassette | — | Yes[5] |
| Number of Cassette Elevators | — | 2[5] |
| Wafer Handling | — | Random Access Robot[5] |
| Mini-Environment | — | Yes[5] |
| Stage | — | ETAL Stage[5] |
| Robot | — | Yaskawa Robot with NXC100 Controller[5] |
| Floatation Controller | — | IDE Maxon 1000 Floatation Controller[5] |
| Version | — | 300 mm[6] |
| Vintage | — | 30.04.2010[6] |
| Quantity | — | 1[6] |
| Sales Condition | — | as is where is[6] |
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