Comparison ledger
KLA 0035235-003 MMD Head, KLA Puma 9130, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Puma 9130KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | KLA Puma 9130 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[2] | 50/60 Hz[3] |
| Model | 0035235-003[2] | Puma 9130[5] |
| Make | KLA[2] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[2] | — |
| Compatible System | KLA AIT-XP[2] | — |
| Voltage | — | 208 V[3] |
| Phase | — | 3 Phase[3] |
| Full Load | — | 16 A[3] |
| Largest Load | — | 8 A[3] |
| Amps Full Load | — | 4[4] |
| OEM | — | KLA[5] |
| Category | — | Metrology & Inspection[5] |
| Electrical | — | 208 V, 3 phase, 50/60 Hz[5] |
| Full load current | — | 16 A[3] |
| Largest load current | — | 8 A[3] |
| Vintage | — | 2007[3] |
| Power | — | 208 V, 3 phase, 50/60 Hz[3] |
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