Comparison ledger
Hitachi TM 3030 Plus, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TM 3030 PlusHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 2014– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi TM | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Desktop[1] | NIST Traceable[4] |
| Type | Desktop scanning electron microscope[1] | — |
| Detector | Premium SE Detector[1] | — |
| EDS | No EDS[1] | — |
| Operating voltages | 5 kV, 15 kV[2] | — |
| Detectors | SE, BSE, mix[2] | — |
| Modes | regular, charge reduction[2] | — |
| Maximum magnification | 60,000x[2] | — |
| Technique | Scanning Electron Microscopy (SEM)[3] | — |
| Maximum sample size | Up to 70 mm diameter and 50 mm thickness[3] | — |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[4] |
| NIST Traceable | — | Yes[4] |
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