Comparison ledger
Hitachi S 8820, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 8820Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 8820 | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | HDD[1] | NIST Traceable[2] |
| Measuring size | 0.1-10 μm[1] | — |
| Power supply | 700-1300 V[1] | — |
| Type | SEM (Scanning Electron Microscope)[1] | — |
| Wafer sizes | 6 inch[1] | — |
| Vacuum / pumping | Scroll pumps not included[1] | — |
| Wafer handling | Open cassette[1] | — |
| Optics / imaging | CCD Camera[1] | — |
| Optics | FCM Objective lens system[1] | — |
| Control / software | Software[1] | — |
| Configuration / options | HDD[1] | — |
| Vintage | 1996[1] | — |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
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