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Comparison ledger

S 4700 FE-SEMversus0035235-003 MMD Head

Hitachi S 4700 FE-SEM, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 4700KLA 0035235-003 MMD Head
Specifications
Phase1 Phase[1]—
Power4 kVA[1]—
Frequency60 Hz[1]—
ConfigurationWindows NT 4.0[2]TSTD PCB ASSY, MMD MEAS HEAD[6]
Wafer size4 inch[5]—
Control systemWindows NT 4.0[2]—
AccessoriesOxford 7200 EDS[2]—
Vintage1997[5]—
OEMHitachi[5]—
ModelS 4700[5]0035235-003[6]
Tool typeField Emission Scanning Electron Microscope (FE-SEM)[5]—
Included accessoryOxford 7200 EDS[2]—
Control platformWindows NT 4.0[2]—
Power/configuration1 Phase - 4 kVA - 60 Hz[1]—
Make—KLA[6]
Part Description—TSTD PCB ASSY, MMD MEAS HEAD[6]
Compatible System—KLA AIT-XP[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing
  6. [6]inventory listing