Comparison ledger
Hitachi 9380 II CD-SEM, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 9380 II CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 9380 II CD-SEM | KLA .498 PSL Wafer |
| Specifications | ||
| Power Phase | Single Phase[1] | — |
| Vacuum Pump | Leybold/ TMP 340 ML /3[1] | — |
| Power Supply Unit | PS Unit (569-6546)[1] | — |
| Software Version | 26.23[1] | — |
| Port Configuration | 12" E3 Port / 8" OCL2300 Port[1] | — |
| Number of FOUR Ports | 3[1] | — |
| Chiller | Hitachi / W-5010 T[1] | — |
| Configuration | — | NIST Traceable[2] |
| NIST traceability | — | Yes[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →