Comparison ledger
Hitachi 9380 II CD-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 9380 II CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 9380 II CD-SEM | KLA .204 PSL Wafer |
| Specifications | ||
| Power Phase | Single Phase[1] | — |
| Vacuum Pump | Leybold/ TMP 340 ML /3[1] | — |
| Power Supply Unit | PS Unit (569-6546)[1] | — |
| Software Version | 26.23[1] | — |
| Port Configuration | 12" E3 Port / 8" OCL2300 Port[1] | — |
| Number of FOUR Ports | 3[1] | — |
| Chiller | Hitachi / W-5010 T[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
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