Comparison ledger
Hitachi 1305 BSG 3, SCREEN SS W 80 A-AR, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | SS W 80 A-ARSCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN SS W 80 |
| Specifications | ||
| Configuration | — | Fully upgraded DNS SS-W80A-AR:[1] |
| Wafer size | — | 200mm Notch Standard Silicon Wafer Substrate (Left to Right wafer flow)[1] |
| Make | — | SCREEN / DNS[1] |
| Model | — | SS W 80 A-AR[1] |
| Wafer Sizes | — | 8 inch[1] |
| Scrubbing Units | — | 2 front, 2 back side[1] |
| Reverse Units | — | 2[1] |
| DI Water Rinse | — | Included[1] |
| Back Rinse | — | Included[1] |
| Brush Rinse | — | Included[1] |
| Nano DIW with N2 | — | Included[1] |
| Wafer substrate | — | 200mm notch standard silicon wafer substrate[1] |
| Communication | — | SECS II or GEM included[1] |
| Wafer log tracking | — | Real time wafer log tracking system per each wafer[1] |
| Auto back-up system | — | Included[1] |
| Recipe processing | — | Wafer level recipe processing; multi recipe/job processing per cassette (max 25 recipes per 1 cassette)[1] |
| Automatic wafer collection feature | — | Included[1] |
| Auto teaching feature | — | Included[1] |
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