Comparison ledger
EV Group 120 Automated Coater Processing, Lam Research Gasonics Gamma 2130 Photoresist Stripper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 Automated Coater ProcessingEV Group | Gasonics Gamma 2130 Photoresist StripperLam Research |
|---|---|---|
| OEM | EV Group | Lam Research |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 120 Automated Coater Processing | Lam Research Gasonics |
| Specifications | ||
| Configuration | 50/60 Hz[1] | System Configuration:[2] |
| Phase | 3 Phase[1] | — |
| Wafer sizes | 6 inch, 8 inch[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Wiring configuration | 4 Wire + GND[1] | — |
| Vintage | 2015[1] | — |
| Load Port | — | Brooks Fixload TM V6[2] |
| EFEM Robot | — | 02-169208-00[2] |
| Aligner | — | Yaskawa[2] |
| RF Rack | — | Generator ENI GHW-50A-04 5ea[2] |
| Light Curtain | — | Keyence[2] |
| EPD | — | 4ea(#2,#3,#4,#5 Port)[2] |
| RF Matcher | — | CPMX-3000 5ea[2] |
| RF Source | — | 02-352103-00 5ea[2] |
| HDIS Pedestal | — | #2, #3, #,1, #6[2] |
| Fixed Pedestal | — | #4, #5[2] |
| Stage #1 | — | Preheat[2] |
Plan your fab
Building a Resist Processing process? Get a complete equipment list.
Open the fab equipment planner →