Comparison ledger
EV Group 120 Automated Coater Processing, Headway 1 EC 101 R 485 Photoresist Spinner, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 Automated Coater ProcessingEV Group | |
|---|---|---|
| OEM | EV Group | Headway |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 120 Automated Coater Processing | Headway 1 EC 101 R 485 Photoresist Spinner |
| Specifications | ||
| Configuration | 50/60 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Wafer sizes | 6 inch, 8 inch[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Wiring configuration | 4 Wire + GND[1] | — |
| Vintage | 2015[1] | — |
| Vacuum requirement | — | 23" Hg[2] |
| Electrical | — | 115 V, 3 A, 50/60 Hz, 1 Ø (single phase)[2] |
| Electrical power | — | 115 V, 3 A, 50/60 Hz, 1 Ø (single phase)[2] |
Plan your fab
Building a Resist Processing process? Get a complete equipment list.
Open the fab equipment planner →