Comparison ledger
Espec HRS-800HS-20, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HRS-800HS-20Espec | 1007KLA |
|---|---|---|
| OEM | Espec | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Espec HRS-800HS-20 | KLA 1007 |
| Cited variants |
| — |
| Specifications | ||
| Temperature range | -70°C to +180°C[1] | — |
| Humidity range | 20%rh to 98%rh[1] | — |
| Temperature change rate | 20°C/min[1] | — |
| Interior dimensions (W×H×D) | 1000×1000×800 mm[1] | — |
| Model | HRS-800HS-20[1] | 1007[3] |
| Equipment type | Temperature & humidity chamber[1] | Prober[4] |
| Temperature rate of change | Heat up rate: 20K/min; Pull down rate: 20K/min[2] | — |
| Temperature & humidity range | +20 to 85°C / 20 to 98%RH[2] | — |
| Inside dimensions (W×H×D) | 1000 × 1000 × 800 mm[2] | — |
| Capacity | 800 L[2] | — |
| Manufacturer | — | KLA[3] |
| Description | — | Wafer Prober[3] |
| Wafer size | — | 150 mm[3] |
| Convertible to 8 inch wafer size | — | Yes[3] |
| Vintage | — | 01.06.1995[3] |
| Make | — | KLA[4] |
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