Comparison ledger
Disco DFL 7560 L, Lapmaster 15, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DFL 7560 LDisco | 15Lapmaster |
|---|---|---|
| OEM | Disco | Lapmaster |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | Robot Wafer handling | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DFL | Lapmaster 15 |
| Cited variants |
| — |
| Specifications | ||
| Wafer size | Robot Wafer handling[1] | — |
| Wafer | Can be modified at later date to 3”, 4” & 6” wafers and frame[1] | — |
| Configuration | Operation by touch panel LCD monitor[1] | — |
| Uninterruptible Power Supply | 1[1] | — |
| Wafer Sizes (standard) | 2, 3, 4 inch[1] | — |
| Wafer Size Modification | Can be modified to 3”, 4” & 6” wafers and frame[1] | — |
| Maximum Workpiece Size | ø150 mm[2] | — |
| Processing Mode | Fully automatic[2] | — |
| Dimensions (W x D x H) | 2,000 x 1,810 x 1,800 mm[2] | — |
| Weight | approx. 3,300 kg[2] | — |
| Robot Wafer Handling | Yes[1] | — |
| Operation Interface | Touch panel LCD monitor[1] | — |
| Power Supply | Step-down Transformer 400 V, 3 phases, 50 Hz[1] | — |
| CE Marking | Yes[1] | — |
| Microscope | Low and High Magnification microscope with LED illumination[1] | — |
| Axis Control | X and Y axis with linear scale closed loop control[1] | — |
| Laser Cooling | Laser power supply with built in water cooled chillers[1] | — |
| Additional Chiller | Chiller unit to supply cooling water for Laser power supply[1] | — |
| X Axis Chiller | Chiller unit to supply cooling water to X axis[1] | — |
| Z Axis Positional Repeatability | 0.002 mm[1] | — |
| Optional Upgrade | 200 mm Fully Automatic wafer handling from/to standard wafer cassette, Chuck for 200mm wafers, New robot design for handling heavier wafers, 6 inch Lens and new Galvo Scanner[1] | — |
| Input Power | — | 110 Vac[3] |
| Plate Diameter | — | 15 inches (381 mm)[4] |
| Number of Conditioning Rings | — | 3[4] |
| Ring ID | — | 5.5 inches (140 mm)[4] |
| Standard RPM | — | 60[4] |
| RPM Range (Variable Speed Drive) | — | 0-60[4] |
| Drive Motor - Lapper | — | 0.5 HP (0.37 kW)[4] |
| Drive Motor - Polisher | — | 0.75 HP (0.56 kW)[4] |
| Length | — | 25 inches (635 mm)[4] |
| Width | — | 20 inches (508 mm)[4] |
| Height | — | 24 inches (610 mm)[4] |
| Estimated Shipping Weight | — | 285 lbs (129.3 kg)[4] |
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