Waferpedia

Comparison ledger

DCS1440versusEDC-650

Disco DCS1440, Laurell EDC-650, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
DCS1440Disco
EDC-650Laurell
OEMDiscoLaurell
Category——
Wafer size100mm100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DCS1440Laurell EDC-650
Specifications
Mentioned functionatomizing cleaning[1]—
Associated equipmentDAG810 automatic surface grinder[1]—
Maximum workpiece sizeΦ8 inch[2]—
Application frame2-8-1[3]—
Table RPM100 to 3,000 min⁻¹[2]—
Setting time for cleaning/drying0 to 999 sec[2]—
Cleaning nozzle speed1 to 37.5 °/sec[2]—
Cleaning rangeΦ365 mm (up to 250×250 mm)[2]—
Cleaning pressure range2.3 to 11.8 MPa[2]—
Equipment dimensions (W×D×H)400 × 600 × 1,220 mm[2]—
Dry massApprox. 124 kg[2]—
Maximum square workpiece (optional)250×250 mm[2]—
Model—EDC-650[4]
Equipment name in source—Laurell EDC-650 Spin Processor #2 (Primary Litho)[4]
Wafer handling—Unclamped pieces (mounted on carrier wafer), 100 mm round wafers, 150 mm round wafers, 100 mm × 100 mm square wafers[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]disco.co.jpdisco.co.jp
  3. [3]disco.com.sgdisco.com.sg
  4. [4]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca