Waferpedia

Comparison ledger

3220versusKR15

Disco 3220, Disco KR15, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
KR15Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size—8"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco KR15
Cited variants—
  • KR15-A/KR15-B[1]
Specifications
equipment typedicing saw[2]—
Workplace sizeø150 mm[3]—
Spindle layoutSingle[3]—
Spindle output1.5 kW at 30,000 min-1[3]—
Spindle max revolution speed40,000 min-1[3]—
X-axis feed speed range0.1 – 500 mm/s[3]—
Y-axis index step0.0001 mm[3]—
Z-axis repeating accuracy0.001 mm[3]—
Z-axis max blade sizeø58 mm[3]—
Blade designation—Disco KR15[4]
Blade thickness—200 micron[4]
Blade grit—low grit[4]
Intended materials—sapphire, glass, and silicon[4]
Max. workpiece size—Φ8"[4]
Thickness—200 micron[4]
Grit—Low grit[4]
Materials—sapphire, glass, and silicon[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]thk.comthk.com
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]aggiefab.tamu.eduaggiefab.tamu.edu