Waferpedia

Comparison ledger

3220versusDGP 8760 + DFM 2800

Disco 3220, Disco DGP 8760 + DFM 2800, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco DGP 8760
Specifications
equipment typedicing saw[1]—
Workplace sizeø150 mm[2]—
Spindle layoutSingle[2]—
Spindle output1.5 kW at 30,000 min-1[2]—
Spindle max revolution speed40,000 min-1[2]—
X-axis feed speed range0.1 – 500 mm/s[2]—
Y-axis index step0.0001 mm[2]—
Z-axis repeating accuracy0.001 mm[2]—
Z-axis max blade sizeø58 mm[2]—
Configuration—Fully automatic[3]
Wafer Sizes—8, 12 inch[3]
Fully automatic—Yes[3]
Power—200 Vac, 3 Phase[3]
Inline UV irradiation system—Present[3]
Pre-Cut Dicing Tape—Yes[3]
Finish thickness min with wafer polishing—Up to 50ums[3]
Minimum finish thickness with wafer polishing—50 µm[3]
Operation type—Fully automatic[3]
Configuration options—Stand-alone BG or in-line with wafer mounter[3]
Vintage year—2009[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]inventory listing