Comparison ledger
Disco 321, Disco DFD 6240 Fully Automatic Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Disco DFD 6240 Fully Automatic Dicing |
| Specifications | ||
| OEM | Disco[1] | — |
| Model | 321[1] | — |
| Equipment type | Wafer Dicing Saw[1] | — |
| Facility context | Cleanroom Instrumentation[1] | — |
| Application area | Nano and Micro Fabrication[1] | — |
| Location | FNT 4.106[1] | — |
| Wafer Size | Up to 6 inches[2] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3] | — |
| Spindle Power (alternate) | 1500 Watt spindle[2] | — |
| Non-Contact Setup | Non Contact Setup[3] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3] | — |
| Broken Blade Detection | Broken Blade Detection[3] | — |
| Light Tower | Includes Light Tower[3] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[2] | — |
| Wafer size capability | Up to 6" wafers[3] | — |
| Chuck | 6-inch porous film frame chuck[2] | — |
| Spindle power | 1500-watt spindle[2] | — |
| Footprint | Small footprint[2] | — |
| Setup | Non-contact setup[3] | — |
| Blade break detection | Broken blade detection[3] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[3] | — |
| Max workpiece size | — | Φ8 inch[4] |
| X-axis cutting range | — | 210 mm[4] |
| Cutting speed (X-axis) | — | 0.1–1,000 mm/s (0.1–600 mm/s in source 3/6)[4] |
| Y-axis cutting range | — | 210 mm[4] |
| Y-axis index step | — | 0.0001 mm[4] |
| Y-axis positioning accuracy | — | Within 0.002/210 mm (single error)[4] |
| Z-axis max stroke | — | 19.22 mm (for Φ2 inch blade) / 19.9 mm (for Φ3 inch blade)[4] |
| Z-axis moving resolution | — | 0.00005 mm[4] |
| Z-axis repeatability accuracy | — | 0.001 mm[4] |
| Max blade size | — | Φ58 mm (or Φ2 inch/Φ3 inch blades depending on spindle option)[4] |
| θ-axis max rotating angle | — | 380 deg[4] |
| Spindle output (standard) | — | 1.2 kW at 60,000 min⁻¹[4] |
| Rated torque (1.2 kW spindle) | — | 0.19 N·m[4] |
| Revolution speed range (1.2 kW spindle) | — | 6,000–60,000 min⁻¹[4] |
| Spindle options | — | 1.8 kW (2 inch blades), 2.2 kW (3 inch blades)[4] |
| Equipment dimensions (W×D×H) | — | 900 mm × 1,190 mm × 1,800 mm[4] |
| Equipment weight | — | Approx. 1,200 kg (without transformer) / approx. 1,280 kg (with transformer)[4] |
| Applicable tape frame | — | 2-8-1[5] |
| Power consumption (processing) | — | 1.5 kW (for reference)[6] |
| Power consumption (warm-up) | — | 1.0 kW (for reference)[6] |
| Air pressure | — | 0.5–0.8 MPa[5] |
| Average air consumption during operation | — | 110.0 L/min(ANR) (for reference)[5] |
| Clean air pressure | — | 0.5–0.8 MPa[5] |
| Average clean air consumption during operation | — | 70.0 L/min(ANR) (for reference)[5] |
| Cutting water / spinner cleaning water / water curtain pressure | — | 0.2–0.4 MPa[5] |
| Max consumption flow rate (cutting water) | — | 6 L/min[5] |
| Max consumption flow rate (water curtain) | — | 1 L/min[5] |
| Cooling water pressure | — | 0.2–0.4 MPa[5] |
| Cooling water consumption flow rate | — | 1.5 L/min at 0.3 MPa[5] |
| Exhaust duct capacity | — | 5.0 m³/min[5] |
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