Waferpedia

Comparison ledger

321versusDAD321

Disco 321, Disco DAD321, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
DAD321Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Disco DAD321
Specifications
OEMDisco[1]—
Model321[1]—
Equipment typeWafer Dicing Saw[1]—
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]—
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Machine type—Automatic dicing saw[4]
Wafer size—100 mm, 150 mm[4]
Supported wafer materials—Silicon, glass and pyrex wafers[4]
Other materials—Other materials on demand[4]
Maximum thickness on silicon—1 mm[4]
Maximum thickness on glass and pyrex—2.4 mm[4]
Max wafer size—6 inches[5]
Wafer type—All shapes and sizes[5]
Max wafer thickness—2 mm[5]
Max blade speed—30,000 rpm[5]
Max feed speed—2 mm/sec[5]
Tape thickness—70 μm[5]
Max thickness (silicon)—1 mm[4]
Max thickness (glass/pyrex)—2.4 mm[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]epfl.chepfl.ch
  5. [5]ncf.uic.eduncf.uic.edu