Waferpedia

Comparison ledger

SE 300 Ultra SPIversus.204 PSL Wafer

CyberOptics SE 300 Ultra SPI, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SE 300 Ultra SPICyberOptics
OEMCyberOpticsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCyberOptics SE 300 Ultra SPIKLA .204 PSL Wafer
Specifications
Configuration—NIST Traceable[1]
Wafer Size—8 inch[1]
Traceability—NIST[2]
Compatible Tools—Surfscan 6xy0, Sp1[1]
NIST Traceable—Yes[1]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com