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Comparison ledger

11000versusExcel 664 UC

Cascade Microtech 11000, Micro-Vu Excel 664 UC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11000Cascade Microtech
Excel 664 UCMicro-Vu
OEMCascade MicrotechMicro-Vu
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCascade Microtech 11000Micro-Vu Excel 664 UC
Specifications
ConfigurationWith antivibration table[1]With Touch Probes[3]
Control & software—W 11 PC[4]
Configuration & options—With Touch Probes[4]
Touch probe kit—Renishaw TP20-4 Touch Probe Kit with 4 port Change Rack[5]
Software—Inspec v.2.9710[5]
Measurement capacity—650 x 680 x 400 mm[6]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]syncservices.netsyncservices.net
  6. [6]loebequipment.comloebequipment.com
  7. [7]atiquality.comatiquality.com