Canon

FPA 3000 i 4 i-Line alternatives

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Comparable Lithography equipment documented in the Waferpedia catalog.

Canon FPA 3000 i 4 i-Line entry →All Lithography tools →

6 comparable tools

Nikon
NSR 2205 i 11 D i-Line
Lithography
The Nikon NSR 2205 i 11 D i-Line Stepper is a Nikon lithography stepper specified for 4-inch wafers.
Brooks
017-0024-01 Prealigner
Lithography
Brooks
017-0146-01 Prealigner
Lithography
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
Ultratech
1000 Family
Lithography
EV Group
101
Lithography
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.
SUSS MicroTec
150 e Mask
Lithography
The SUSS 150 e is a mask aligner manufactured by SUSS MicroTec.

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