Canon
FPA 2500 i 3 i-Line alternatives
Comparable Lithography equipment documented in the Waferpedia catalog.
6 comparable tools
Nikon
NSR 2205 i 11 D i-Line
Lithography
The Nikon NSR 2205 i 11 D i-Line Stepper is a Nikon lithography stepper specified for 4-inch wafers.
Nikon
NSR 2205 i 12 D i-Line
Can produce wafer as-is
Lithography
The Nikon NSR 2205 i 12 D is an i-line stepper used in photolithography, available in 6-inch and 8-inch wafer configurations.
Brooks
017-0024-01 Prealigner
Lithography
Brooks
017-0146-01 Prealigner
Lithography
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
Ultratech
1000 Family
Lithography
EV Group
101
Lithography
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.
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