Comparison ledger
Bruker Dektak 150 Surface, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Dektak 150 SurfaceBruker | |
|---|---|---|
| OEM | Bruker | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker Dektak 150 Surface | KLA 1.112 PSL Wafer |
| Specifications | ||
| Manufacturer | Bruker / Veeco[1] | — |
| Model | Dektak 150[1] | — |
| Type | Surface profilometer[1] | — |
| Description | Advanced thin and thick film step height measurement tool[2] | — |
| Measurement capabilities | Surface topography, waviness, and surface roughness[2] | — |
| Step-height repeatability | 0.6 nm[2] | — |
| Maximum substrate size | 6 inch[2] | — |
| Sample dimension | up to six inches in dimension[2] | — |
| Sample thickness | up to four inches thick[2] | — |
| Stage | Single-axis 4-inch Y auto stage[2] | — |
| 3D imaging | Enables mapping of 3D images[2] | — |
| Vertical resolution | 1 Ångström[3] | — |
| Vertical range | 524 µm[3] | — |
| Stylus radius | 12.5 µm, 5.0 µm, 2.5 µm[3] | — |
| Measurement method | Contact stylus[4] | — |
| Maximum sample size | 150 mm (6-inch)[4] | — |
| Scan length | 55 mm[4] | — |
| Optional vertical range | 1 mm[4] | — |
| Configuration | — | NIST Traceable[5] |
| Wafer Size | — | 8 inch[5] |
| NIST Traceable | — | True[5] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[6] |
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