Comparison ledger
Brooks 017-0146-01 Prealigner, RECIF SPP 300 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | SPP 300 WaferRECIF |
|---|---|---|
| OEM | Brooks | RECIF |
| Category | Lithography | Lithography |
| Wafer size | — | Front & Backside Wafer ID Reader (RFID) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | RECIF SPP 300 Wafer |
| Specifications | ||
| Configuration | — | 300 mm (12") FOUP Load Port[1] |
| Servicing Port | — | M / F Rear (Can Add 3rd LP Here)[1] |
| Wafer size | — | Front & Backside Wafer ID Reader (RFID)[1] |
| Status Lamp (Front & Rear) | — | Programmable[1] |
| Turn to Release EMO | — | Load Ports, M / F Rear[1] |
| Vacuum (House) | — | Optional Depending on LPS Used[1] |
| Power | — | 110 VAC, 15 A, 3 Wire, 1 Phase, Freq 60 Hz[1] |
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