Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon SF 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | SF 200Nikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon SF 200 |
| Specifications | ||
| Laser | — | Komatsu[1] |
| Resolution | — | 0.18um[1] |
| Wafer loader type | — | type 3, NC Pre2[1] |
| Reticle size | — | 6"[1] |
| Max expose field size | — | 26mm x 33mm[1] |
| Reticle library | — | Nikon standard (9 slot)[1] |
| Configuration | — | PPD[1] |
| Alignment system | — | LSA, FIA[1] |
| Inline | — | Left in'line[1] |
| Chamber type | — | S61[1] |
| Wafer sizes | — | 8 inch[1] |
| PPD | — | Yes[1] |
| Bar code reader | — | Yes[1] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →