Waferpedia

Comparison ledger

017-0024-01 PrealignerversusMJB55

Brooks 017-0024-01 Prealigner, SUSS MicroTec MJB55, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MJB55SUSS MicroTec
OEMBrooksSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced—1975
Production run—1975–
Lifecycle—Mature
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerSUSS MicroTec MJB55
Specifications
Type—Mask aligner[1]
Application—Photolithography[1]
Target market—Mass production[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org