Comparison ledger
Brooks 017-0024-01 Prealigner, OAI Model 212, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | Model 212OAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | OAI Model 212 |
| Specifications | ||
| Type | — | Large Area Mask Aligner[1] |
| Form factor | — | Tabletop Mask Aligner[1] |
| Substrate size | — | up to 12″x12″[1] |
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