Comparison ledger
Brooks 017-0024-01 Prealigner, Nikon NSR 2205 i 11 C i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2001– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | Nikon NSR 2205 |
| Specifications | ||
| Configuration | — | 0.40um[1] |
| Resolution | — | 0.45um L&S[2] |
| Total Focus Deviation | — | 0.45um L&S[2] |
| Astigmatism | — | 0.35um L&S[2] |
| Inclination | — | 0.40um[2] |
| Lens Distortion | — | 0.55um[2] |
| Mag Control Accuracy | — | 0.25um[2] |
| Focus Control Accuracy | — | 0.2um[2] |
| Wafer Size | — | 6 inch, 8 inch[1] |
| Resolution (L&S) | — | 0.45 µm[2] |
| Total Focus Deviation (L&S) | — | 0.45 µm[2] |
| Astigmatism (L&S) | — | 0.35 µm[2] |
| Magnification Control Accuracy | — | 0.25 µm[2] |
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