Waferpedia

Comparison ledger

B2versusMA-4

Brewer Science B2, Karl Suss MA-4, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
B2Brewer Science
MA-4Karl Suss
OEMBrewer ScienceKarl Suss
CategoryLithographyLithography
Wafer size100mm100mm
Process nodeDUV—
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrewer Science B2Karl Suss MA-4
Specifications
TypeDevelopable BARC[1]—
Name in ACT-8 process listB2 DUV42P[1]—
Configured wafer size on ACT-8100 mm (4") wafers[1]—
OEM—Karl Suss[2]
Model—MA-4[2]
Equipment type—Mask Aligner[2]
Substrate size—Up to 4" (100mm) in diameter[2]
Sample compatibility—Works for smaller samples[2]
Alignment mode—Contact/proximity aligner[2]
Illumination wavelengths—365 nm or 405 nm[2]
Backside alignment—Real-time infrared through-wafer backside alignment[2]

Plan your fab

Building a Lithography process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]nanocenter.umd.edunanocenter.umd.edu