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0 V 500versus5204 Diffusion

Blue M 0 V 500, Thermco 5204 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
5204 DiffusionThermco
OEMBlue MThermco
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Thermco 5204 Diffusion
Specifications
Wafer Size—6 inch (150 mm)[1]
Flat Zone—40 inches[2]
Control System—TMX[2]
Load Station Length—Approximately 10 feet[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com