Comparison ledger
Blue M 0 V 500, Blue M IGF-6680E-MP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | IGF-6680E-MPBlue M |
|---|---|---|
| OEM | Blue M | Blue M |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Blue M IGF-6680E-MP |
| Specifications | ||
| Model | — | IGF-6680E-MP[1] |
| Type | — | electric industrial furnace[1] |
| Controller | — | Pro-Master I microprocessor controller[1] |
| Temperature monitoring | — | two thermocouples, one for the controller and one for the over temperature alarm[1] |
| Over temperature alarm setpoint | — | 593 C[1] |
| Available gas input | — | N2[1] |
| Chamber atmosphere | — | inert gas atmosphere; inert or forming gas ambient by request[1] |
| Chamber venting | — | vented to the chemical hood exhaust system[1] |
| Location | — | cleanroom, packaging bay[1] |
| Training | — | 3 sessions (2 trainings and a checkout session)[1] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →