Waferpedia

Comparison ledger

0 500versusPCO 520

Blue M 0 500, Heller PCO 520, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
PCO 520Heller
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Heller PCO 520
Specifications
ManufacturerBlue M[1]—
Model0 500[1]PCO 520[2]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]Pressure curing oven[3]
Phase—3 Phase[2]
Largest Heater Load—20.7 A[2]
Short Circuit Interrupting Capacity—10K A[2]
Make—Heller[2]
Voltage—208-220 V[2]
Current—102 A[2]
Frequency—50-60 Hz[2]
Typical process time—120 min or per user spec[3]
Operating temperature—60°C – 200°C[3]
Max temperature—220°C[3]
Operating pressure—1 – 10 bar[3]
Capacity—24 magazines (typical)[3]
Cooling method—PCW (17°C – 23°C)[3]
Cooling water pressure—25 – 40 psi[3]
Oven size—2,200[L] x 1,700[W] x 1,700[H] mm[3]
Chamber usable area—716.5[L] x 608[W] x 440[H] mm[3]
Max operating pressure—10 bar (145 psi)[3]
Max operating temperature—200°C[3]
Loading type—Manual loading[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]sinerji-grup.comsinerji-grup.com