Waferpedia

Comparison ledger

0 500versus1500EXL

Blue M 0 500, Heller 1500EXL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
1500EXLHeller
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Heller 1500EXL
Cited variants—
Specifications
ManufacturerBlue M[2]—
Model0 500[2]—
Asset number139866[2]—
Last confirm dateSeptember 10, 2025[2]—
Equipment typeOven[2]—
Series—EXL Series[1]
Heating zones—Five heating zones[1]
Cooling zones—One internal cooling zone[1]
Profiling—Five thermocouple profiling[1]
Line speed—Up to 28 inches (70 cm) per minute[1]
Airflow improvement—25% higher airflow compared to previous designs[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]Equipment inventory listing
  3. [3]semiconductoronline.comsemiconductoronline.com