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Comparison ledger

RapidCure 320 FC Radiator UV Annealversus0 V 500

Axcelis RapidCure 320 FC Radiator UV Anneal, Blue M 0 V 500, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
OEMAxcelisBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis RapidCure 320 FC Radiator UV AnnealBlue M 0 V 500
Specifications
ManufacturerAxcelis[1]—
ModelRapidCure 320 FC[2]—
Equipment typeRadiator UV Anneal System[2]—
Asset #82317[2]—
Vintage2006[2]—

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing