Comparison ledger
Axcelis NV 8200 P, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV 8200 PAxcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV 8200 P | Varian 160 XP Ion |
| Specifications | ||
| Category | Ion Implantation[1] | — |
| Wafer sizes | 6 inch[2] | — |
| Model listing | Axcelis NV 8200 P Implanter[2] | — |
| Configuration | — | 150mm High Current IMP[4] |
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