Waferpedia

Comparison ledger

M 150 PC UVversus1000 Hot Plate

Axcelis M 150 PC UV, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAxcelisCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis M 150 PC UVCEE 1000 Hot Plate
Specifications
ConfigurationDoes not include boards[1]4"[3]
MakeAxcelis[1]—
ModelM 150 PC[1]—
Equipment typeUV Cure System[2]—
Wafer size6 inch[1]—
Vintage2001 Vintage[1]—
Does not include boardsDoes not include boards[2]—
Wafer Sizes6 inch[1]—
CategoryThermal / Diffusion[2]—
Type—Hot Plate[3]
Wafer Size—4 inch[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing