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Comparison ledger

GSD 100 High Currentversus160 XP Ion

Axcelis GSD 100 High Current, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
GSD 100 High CurrentAxcelis
160 XP IonVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis GSD 100 High CurrentVarian 160 XP Ion
Specifications
Wafer Size6 inch[1]—
Configuration—150mm High Current IMP[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com