Comparison ledger
Axcelis Fusion M 200 PCU UV, Heller 1088, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Fusion M 200 PCU UVAxcelis | 1088Heller |
|---|---|---|
| OEM | Axcelis | Heller |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis Fusion M 200 PCU UV | Heller 1088 |
| Specifications | ||
| Make | Axcelis[1] | — |
| Model | Fusion M 200 PCU[1] | — |
| Wafer Sizes | 8 inch[1] | — |
| System Type | UV Cure System[1] | — |
| Heating Zones | — | 8 zones (4 top and 4 below) plus 1 cooling zone[2] |
| Heating Method | — | Forced convection[2] |
| Conveyor Width | — | 18 inches (45 cm)[2] |
| Heated Length | — | 43.5 inches (111 cm)[2] |
| Overall Length | — | 96 inches (244 cm)[2] |
| Height | — | 50 inches (127 cm)[2] |
| Net Weight | — | 900 lbs (409 kg)[2] |
| Thermal Profiler | — | Included[2] |
| Oven Top | — | Counter balance for easy access to conveyor[2] |
| Solder Compatibility | — | Lead-free and leaded soldering[2] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →