Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, SVG 8626 Photoresist, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | Axcelis | SVG |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SVG 8626 |
| Specifications | ||
| Configuration | 14 Amps[1] | Cassette to cassette[3] |
| Voltage | 380 V[1] | — |
| Frequency | 50 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Wafer Size | — | 6 inch[3] |
| Number of Coats | — | 2 coat[3] |
| Pumps | — | Excluded[3] |
| Track Type | — | Dual track[4] |
| Hotplates | — | Included[4] |
| OEM | — | SVG[3] |
| Model | — | 8626[3] |
| Equipment type | — | Photo Resist Coaters[4] |
| Wafer sizes | — | 6 inch[3] |
| Coat count | — | 2 coat[3] |
| Description | — | Dual Track Photoresist Coater With Hotplates[4] |
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