Comparison ledger
Axcelis 200 ACU, SPTS Monarch Hydrofluoric (HF) Vapor, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | |
|---|---|---|
| OEM | Axcelis | SPTS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SPTS Monarch Hydrofluoric (HF) Vapor |
| Specifications | ||
| Configuration | Parts Machine[1] | — |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Temperature | — | 35 C to 70 C[5] |
| Pressure | — | 50-250 Torr[5] |
| HF Flow Rates | — | 50 sccm-1000 sccm[5] |
| Ethanol Flow Rates | — | 0.1 to 1 ml/min[5] |
| Wafer Size | — | 8 inch[5] |
| Temperature Range | — | 35°C to 70°C[5] |
| Pressure Range | — | 50–250 Torr[5] |
| HF Flow Rate | — | 50–1000 sccm[5] |
| Ethanol Flow Rate | — | 0.1–1 ml/min[5] |
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