Comparison ledger
Axcelis 200 ACU, SCREEN WS 820 L, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | WS 820 LSCREEN |
|---|---|---|
| OEM | Axcelis | SCREEN |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1996 Vintage · 1997 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | SCREEN WS 820 L |
| Specifications | ||
| Configuration | Parts Machine[1] | SiN Wet Etching[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Chemical | — | H3PO4 , IPA , HF[5] |
| PLC (Loader / Unloader) | — | Mitsubishi A3A CPU P21[5] |
| Olifra | — | wafer flatzone[5] |
| Main PC | — | Mitsubishi/LM (hard disket OK)[5] |
| Signal Tower | — | 3 color (GYR) Patlite lamp type[5] |
| Phase | — | 3 Phase, 208V, 170a, 100V[5] |
| Left/ Right Stepping Motor (Oriental | — | VEXTA A 6259)[5] |
| Up/Down Stepping Motor (Oriental | — | VEXTA PK 596 H[5] |
| Wafer Size | — | 8 inch[5] |
| Process | — | SiN wet etching, nitride strip[5] |
| Chemicals | — | H3PO4, IPA, HF[5] |
| Transfer Type | — | Rear type transfer flow[5] |
| IPA Dryer Fire Extinguisher | — | Yes[5] |
| PLC | — | Mitsubishi A3A CPU P21[5] |
| Wafer Flatzone | — | Olifra[5] |
| Front Carrier Detector Sensor | — | Yes[5] |
| Power | — | 3 Phase, 208V, 170A, 100V[5] |
| Carrier Loading | — | 2 carrier loading (stocker 8 carrier loading)[5] |
| Stepping Motors (Left/Right) | — | Oriental VEXTA A 6259[5] |
| Stepping Motors (Up/Down) | — | Oriental VEXTA PK 596 H[5] |
| Measuring Units | — | H3PO4 measuring tank, DIW measuring tank, H3PO4 DIW spiking pump, HF measuring tank[5] |
| Resistivity Meter | — | DKK AQ 10 (Final Rinse)[5] |
| Circulation Heater | — | In-Line Heater[5] |
| Circulation Pump | — | FS 30 HT 2[5] |
| Circulation Filter | — | High Temp Filter[5] |
| Aspirator Drain | — | Yes[5] |
| Pump | — | FS 30 HT 2[5] |
| Filter | — | High Temp Filter[5] |
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