Waferpedia

Comparison ledger

Centura Avatarversus200 ACU

Applied Materials Centura Avatar, Axcelis 200 ACU, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Centura AvatarApplied Materials
200 ACUAxcelis
OEMApplied MaterialsAxcelis
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run2012–—
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Centura AvatarAxcelis NV GSD 200
Specifications
Etch typedielectric[1]—
Maximum aspect ratio80:1[1]—
Configuration—Parts Machine[2]
Manufacturer—Axcelis[2]
Model—200 ACU[2]
Tool type—Asher[2]
Wafer size—200mm[4]
Serial number—AU6A356AH[4]
Computer system—M 200 PC, M 200[5]
Part number—SC 4572 A[5]
Volts—208[5]
Amps—30[5]
Equipment type—Asher[2]
Wafer configuration—8 inch[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]storagenewsletter.comstoragenewsletter.com
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]wotol.comwotol.com
  5. [5]semistarcorp.comsemistarcorp.com