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Comparison ledger

9500 XR Ionversus0216 7696, E 11368072 ESC

Applied Materials 9500 XR Ion, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
9500 XR IonApplied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials PI 9500Varian 0216 7696, E 11368072 ESC
Specifications
ConfigurationHigh Current[1]Platen ADV-S Type[3]
GasBF3, AS, P[1]—
Wafer size8 inch[1]—
Current typeHigh current[2]—
Dopant gasesBF3, AS, P[1]—
Vintage year1996[1]—
FamilyPI 9500[2]—
Type—ESC Platen ADV-S Type[3]
Category—Ion Implantation[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com