Comparison ledger
Applied Materials 9500 XR Ion, Axcelis NV 8250, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 9500 XR IonApplied Materials | NV 8250Axcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials PI 9500 | Axcelis NV 8250 |
| Specifications | ||
| Configuration | High Current[2] | Backside[4] |
| Gas | BF3, AS, P[2] | — |
| Wafer size | 8 inch[2] | — |
| Current type | High current[3] | — |
| Dopant gases | BF3, AS, P[2] | — |
| Vintage year | 1996[2] | — |
| Family | PI 9500[3] | — |
| Wafer Sizes | — | 8 inch[1] |
| Energy Range | — | 0-250 keV[1] |
| Power Requirement | — | 208 VAC, 100 A, 50/60 Hz, 3 Phase[1] |
| Programmable Auto Tilt | — | 0-75 degrees[1] |
| Single Stage Extraction | — | 15-40 keV[1] |
| Ion Source Type | — | ELS[1] |
| Source Material Type | — | Moly[1] |
| Electrostatic Chuck (ESC) | — | Yes[1] |
| Parallel Beam using Hybrid Scanning | — | Yes[1] |
| 90 degrees Radially Indexed Dipole Magnet | — | Yes[1] |
| Signal Tower | — | Yes[1] |
| SECS II / GEM Interface | — | Yes[1] |
| Cassette Interface | — | Asyst Bolt-On SMIF (2), Cassette Stages (3), Automatic Flat/Notch Alignment, Programmable Flat Orient[1] |
| Controller | — | Sun Sparc Station V, Application SW Ver. 4.3.2, Auto Start-Up & Computer Monitoring[1] |
| Pump / Cryogenics | — | Source Pump: TMP; Beam Pump: TMP (2) and Cryo Pump (8" Torr, Non On-board); End Station Pump: 2 Cryo Pump (8" Torr, Non On-Board); Cryo Compressor: CTI 8500; Remote Disk Chiller[1] |
| Gas Configuration | — | AsH3 - SDS, PH3 - SDS, BF3 - SDS, Ar - HP[1] |
| Energy Filter System Option | — | Yes[1] |
| Vintage | — | 1999 (Backside)[4] |
| Source Pump | — | TMP[1] |
| Beam Pump | — | TMP (2)[1] |
| End Station Pump | — | 2 Cryo Pump (8" Torr, Non On-Board)[1] |
| Cryo Compressor | — | CTI 8500[1] |
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