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Comparison ledger

5500 100 Dversus1505 G 6 E

Applied Materials 5500 100 D, Nikon 1505 G 6 E, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
5500 100 DApplied Materials
OEMApplied MaterialsNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run—1988–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 5500 100 DNikon 1505
Specifications
equipmentTypeStepper / Scanner[1]—
categoryLithography[2]—
vintageYear1996[1]—
Configuration—5" reticle[3]
Resolution—650 nm[4]
Numerical Aperture—0.54[4]
Reduction—5x[4]
Exposure Field—15 x 15 mm[4]
Alignment Accuracy—130 nm[4]
Wafer Size—4 inch[3]
Light Source—g-line[5]
Introduction Year—1988[4]
NA (Numerical Aperture)—0.54[4]
Make—Nikon[3]
Model—1505 G 6 E[3]
Category—Stepper[3]
Wafer Sizes—4 inch[3]
Exposure type—g-line[4]
NA—0.54[4]
Exposure field—9.3 x 18.8 mm[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]web.archive.orgweb.archive.org
  5. [5]ece.utoronto.caece.utoronto.ca