Waferpedia

Comparison ledger

0720 06060 PartversusOltespa

Applied Materials 0720 06060 Part, Bruker Oltespa, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0720 06060 PartApplied Materials
OltespaBruker
OEMApplied MaterialsBruker
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0720 06060 PartBruker Oltespa
Specifications
ConfigurationContact Pin 24-20 Awg Crimp Gold Flash[1]—
Category—Test & Probe[2]
Model—Oltespa[3]
Tool type—Prober[3]
Probe model—OLTESPA-R4[4]
Probe geometry—Rectangular[4]
Tip radius—7 nm nominal; 10 nm max[4]
Frequency—70 kHz nominal; 50-90 kHz range[4]
Spring constant—2 N/m nominal; 0.6-3.5 N/m range[4]
Cantilever length—240 µm nominal; 225-255 µm range[4]
Cantilever width—40 µm nominal; 38-42 µm range[4]
Cantilever thickness—2.3 µm nominal; 1.6-3.0 µm range[4]
Cantilever material—Silicon[4]
Back-side coating—Reflective Al[4]
Tip height—14 µm nominal; 9-19 µm range[4]
Front angle—0°[4]
Back angle—35°[4]
Side angle—18°[4]
Substrate material—N-type doped silicon; resistivity 0.01-0.02 Ω·cm[5]
Reflective coating—100 nm Al on backside[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]store.bruker.comstore.bruker.com
  5. [5]instrumenthive.cominstrumenthive.com